Inbody Stage
▷Part Number
| Axis | Table Size | Height | Material | Guide Rail | Lead |
| X XY Z: Vertical XYZ |
25: 25 x 25 40: 40 x 40 50: 50 x 50 60: 60 x 60 80: 80 x 80 100: 100 x 100 |
A: Aluminium T: Steel |
M: Micrometer Head W: Worm & Gear S: Lead Screw R: Rack & Pinion |
C: Cross Roller I: In Body D: Dovetail S: Suface Contact B: Ball Bearing |
L: Left R: Right C: Center |
▷Product Features
- X,Y,Z Axis Manual In Body Stage
- High Load Capacity Compared to Linear Stage
- V-Groove rail and roller rotation structure
- We can provide other customizing products
▷Precautions
- The product may malfunction due to external impact and force.
- Attaching the wrong part or attaching too much force may adversely affect the guide.
- Exceeding the travel range may damage the product.
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Table Size (mm) |
Travel Range (mm) |
Load Capacity (kgf) |
Resolution (mm) |
Parallelism (mm) |
Running Parallelism (mm) |
Straightness (mm) |
Weight (kg) |
Lead Mechanism | Guide Rail | Materia | Type | Drawing | ||
| 2D | 3D | ||||||||||||||
| X-25-TMI | 25 x 25 | ±3.25 | 3 | 0.01 | 0.01 | 0.002 | 0.002 | 0.2 | M/H | V/R | ST | L,R,C |  |
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| X-40-TMI | 40 x 40 | ±6.5 | 4 | 0.01 | 0.01 | 0.002 | 0.002 | 0.2 | M/H | V/R | ST | L,R,C | |
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| X-50-TMI | 50 x 50 | ±6.5 | 6 | 0.01 | 0.01 | 0.002 | 0.002 | 0.3 | M/H | V/R | ST | L,R,C | |
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| X-60-TMI | 60 x 60 | ±6.5 | 8 | 0.01 | 0.01 | 0.002 | 0.002 | 0.4 | M/H | V/R | ST | L,R,C | |
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*M/H :Micrometer Head *V/R : V-Groove Rail *ST: Steel
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Table Size (mm) |
Travel Range (mm) |
Load Capacity (kgf) |
Resolution (mm) |
Parallelism (mm) |
Running Parallelism (mm) |
Straightness (mm) |
Weight (kg) |
Lead Mechanism | Guide Rail | Materia | Type | Drawing | ||
| 2D | 3D | ||||||||||||||
| XY-25-TMI | 25 x 25 | ±3.25 | 3 | 0.01 | 0.01 | 0.002 | 0.002 | 0.4 | M/H | V/R | ST | L,R,C | |
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| XY-40-TMI | 40 x 40 | ±6.5 | 4 | 0.01 | 0.01 | 0.002 | 0.002 | 0.4 | M/H | V/R | ST | L,R,C | |
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| XY-50-TMI | 50 x 50 | ±6.5 | 6 | 0.01 | 0.01 | 0.002 | 0.002 | 0.6 | M/H | V/R | ST | L,R,C | |
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| XY-60-TMI | 60 x 60 | ±6.5 | 8 | 0.01 | 0.01 | 0.002 | 0.002 | 0.8 | M/H | V/R | ST | L,R,C | |
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*M/H :Micrometer Head *V/R : V-Groove Rail *ST: Steel
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Table Size (mm) |
Travel Range (mm) |
Load Capacity (kgf) |
Resolution (mm) |
Parallelism (mm) |
Running Parallelism (mm) |
Straightness (mm) |
Weight (kg) |
Lead Mechanism | Guide Rail | Materia | Type | Drawing | ||
| 2D | 3D | ||||||||||||||
| Z-40-TMI | 40 x 40 | ±6.5 | 1.5 | 0.01 | 0.01 | 0.002 | 0.002 | 0.2 | M/H | V/R | ST | L,R,C | |
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| Z-60-TMI | 60 x 60 | ±6.5 | 3 | 0.01 | 0.01 | 0.002 | 0.002 | 0.4 | M/H | V/R | ST | L,R,C | |
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*M/H :Micrometer Head *V/R : V-Groove Rail *ST: Steel
|
Table Size (mm) |
Travel Range (mm) |
Load Capacity (kgf) |
Resolution (mm) |
Parallelism (mm) |
Running Parallelism (mm) |
Straightness (mm) |
Weight (kg) |
Lead Mechanism | Guide Rail | Materia | Type | Drawing | ||
| 2D | 3D | ||||||||||||||
| XYZ-40-TMI | 40 x 40 | ±6.5 | 1.5 | 0.01 | 0.01 | 0.002 | 0.002 | 0.6 | M/H | V/R | ST | L,R,C | |
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| XYZ-60-TMI | 60 x 60 | ±6.5 | 3 | 0.01 | 0.01 | 0.002 | 0.002 | 1.2 | M/H | V/R | ST | L,R,C | |
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*M/H :Micrometer Head *V/R : V-Groove Rail *ST: Steel
1) Parallelism is defined as a parallel orientation of a stage’s upper surface to the datum surface.
2) Running Parallelism is defined as a parallel orientation of a stage’s upper surface to the datum surface while the stage is moving.
3) Straightness is defined as the measures how much a direct stage deviates from the ideal motion axis (the straight line that connects the starting point and the terminating point) during its full stroke.
4) The Load Capacity varies with guide types of the stage. The company defines it as the load that the guide can support when the target object is placed on the center of the stage.